1

Name disciplines

Technology of electronics

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curriculum

2, specialty “Mathematics (scientific design activity)

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Training semester

3

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Quantity of the credits

5

Full name lecturer

Senior lecturer, Malyshev Victor Stepanovich

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Studying  purposes disciplines

Acquaintance with processing methods of formation of integrated microcircuits, as necessary element in case of design of chips.

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Prerekvizita

Physical bases of electronics

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Contents disciplines

Formation of idea of the main technological operations of creation of integrated microcircuits, such as chemical cleaning, silicon oxidation, diffusion in silicon, photolithography, epitaxy, etching диэлектрическихт and the carrying-out coverings, etc., the description of mathematical models of  operations the most important parameters of technological processes.

9

Recommended literature

1. Malyshev V. About the Course of lectures “Technology of an elektroika”. Electronic option.
2. Zee S. GSI technology. Moscow, “World”, 1986
3. I.G. Pichugin. Yu.M., Tairov. Technology of semiconductor items. Moscow, “Higher school”
4. A.F. Burenkov, F.F. Komarov, N.A. Kumakhov of the Table of parameters of space distribution of the ionic implanted impurity. Minsk, BGU to them V.I Lenina, 1986.

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Teaching methods

Lectures with use of illustrative material in the form of slides, a practical training with application of tasks

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Training language

Russian

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Conditions (requirement), current control

Oral testing

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Form of current certifications

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